真空鍍膜、PVD鍍膜、光學鍍膜與表面處理的佼佼者-VTD-machines-超硬鍍膜-vacuum components-Ion

Applications

The ion beam source is particularly well suited for the generation of low energy ions. This source is applied especially for
ion supported PVD coating
Surface cleaning
Surface modification.

A main field of employment is the ion supported deposition of optically active coating systems on mineral glasses and synthetic materials.

Advantages

Coating systems deposited with ion support feature the following improved characteristics:

higher refractive index
higher packing density
better adhesion
better stoichiometry
excellent long term stability vis-à-vis environmental influences
reduced water absorption

Principle

The electrons of the glow cathode, which is primarily used for beam neutralisation, are used for plasma development. The stable discharge is supported by a magnetic field, which is generated through an electromagnetic coil and through the special shape of the gas flow system. The ion source has no lattice. The design of the ion optics supports the development of an optimum geometry of the ion beam.

Ion beam source IBS 120